The cleanroom offers ample hood space, an optical microscope, internet access and (in the rightmost hood) a spin coater. |
Lithographic resists can be spun onto samples using this spin coater. |
The rapid thermal annealer (RTA) is used to improve the semiconductor/metal interface in our devices. |
The Oxygen Plasma Cleaner (left) and Ozone Stripper (right) are used to clean organics off of samples. |
This BOC Edwards E-beam evaporator uses an electron beam to heat a metal source and deposit thin metal films. |
This BOC Edwards Thermal evaporator uses resistive heating to volitize a metal source and deposit thin metal films. |
