| INSTRUMENT | REMARKS | LOCATION |
| Langmuir-Blodgett Trough | Wafer scale alignment & transfer of nanostructures | Characterization & Assembly |
|
| Electron-Beam Evaporator | Source metals: Ti, Ni, Pd, SiO2 | Optical Characterization |
|
| Wire bonder | Chip fabrication | Characterization & Assembly |
|
| UV & Ozone Dry Stripper | | Cleanroom |
|
| Rapid Thermal Annealer (RTA) | Available process gases:
Forming gas (N2/H2), Ar, N2, O2 | Cleanroom |
|
| Plasma Cleaner | | Cleanroom |
|
| Optical Microscope | Bright Field and Dark Field; 5x, 20x and 50x objectives | Cleanroom |
|
| Sonicator | | Cleanroom |
|
| Spin Coater | | Cleanroom |
|
| Spin Coater | Located in laminar flow hood for spinning high quality ebeam resist | Wet lab |
|
| water purifier (2x) | | Cleanroom, Wet lab |
